While implementing ITIL, use of either hard or soft factors alone will make the implementation fail, well this is the experience. A balance of both is the key.
Soft Approach: "sell at every stage" not just to the senior management, but to the people implementing as well. Frequent, persistent and well targeted communication (perhaps of case studies) proving how new processes will work well by making people buy-in. This will reinforce motivation of people who are already sold and help convince others who weren't convinced earlier.
Only when this is done, using hard factors is appropriate. Suggested approach (in a nutshell):
Plan: A policy to direct people on what are the goals that ought to be achieved, what objectives to be met, what amounts to going against the policy and what punitive action will that attract.
A periodic process, procedure and activity training till an ability to establish that people have necessary knowledge and experience to implement the same. Later it can be on an extended schedule.
Check: Use of metrics that indicate compliance with policy and performance of the process, indicate whether implementation is going in right direction.
Act: Rewarding desired and punishing undesired behavior. Providing counselling to help those who are not compliant providing reinforcement for those who are.